Surface Micromachined Micro-Pressure-Sensor
نویسندگان
چکیده
منابع مشابه
Bulk Micromachined Pressure Sensor
Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.
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ژورنال
عنوان ژورنال: IEEJ Transactions on Electronics, Information and Systems
سال: 1992
ISSN: 0385-4221,1348-8155
DOI: 10.1541/ieejeiss1987.112.12_736